Structural Evolution During Formation and Filling of Self-patterned Nanoholes on GaAs (100) Surfaces
Abstract Nanohole formation on an Milk Thistle (Silymarin) AlAs/GaAs superlattice gives insight to both the “drilling” effect of Ga droplets on AlAs as compared to GaAs and the hole-filling process.The shape and depth of the nanoholes formed on GaAs (100) substrates has been studied by the cross-section transmission electron microscopy.